SFS
A B C D E
1 Part Number Description
2 204587 Scan Mirror
3 139190 Fan Set
4 183270 Cassette size switch
5 218049 Daisy Keyboard Controller
6 226653 Amp/Interface Board
7 242392 4 channel PWM motor Drive
8 318809 Below Wafer Detector
9 327433 Assy, P5-75, Config, CPU
10 Model 2114B-30SLT Laser PWR [...]

We provide support for KLA-Tencor-Prometrix systems.
Our service offerings are focused on:
High resolution & standard surface profilers
Surface Scan particle measurement equipment
Defect inspection equipment: Bright field and Dark field
Thin film thickness measuring equipment
Resistivity measuring & mapping systems
Thin film stress measuring systems
Supported Systems Include:
Surf Scan Wafer Inspection Systems Series – 4500, 5000, 5500, 6100,
6200, 6220, 6400, 6420, SP1 [...]