We provide support for KLA-Tencor-Prometrix systems.
Our service offerings are focused on:
High resolution & standard surface profilers
Surface Scan particle measurement equipment
Defect inspection equipment: Bright field and Dark field
Thin film thickness measuring equipment
Resistivity measuring & mapping systems
Thin film stress measuring systems
Supported Systems Include:
Surf Scan Wafer Inspection Systems Series – 4500, 5000, 5500, 6100,
6200, 6220, 6400, 6420, SP1 [...]