SFS
A B C D E
1 Part Number Description
2 204587 Scan Mirror
3 139190 Fan Set
4 183270 Cassette size switch
5 218049 Daisy Keyboard Controller
6 226653 Amp/Interface Board
7 242392 4 channel PWM motor Drive
8 318809 Below Wafer Detector
9 327433 Assy, P5-75, Config, CPU
10 Model 2114B-30SLT Laser PWR Supply
11 KM-803P adapter
12 Empak 200mm FL 192 Adapter
13 JDSU Laser 2214-30SLQC, 30mw, 488nm
14 Universal Cassette Adapter Plate
15 JDSU Laser, PN 1103P-0613
16 Emulex Assy PT1010450-4
17 SECS Kit

UV 1X50 AND 1X80
A B
1 Part Number Description
2 11-0256 Cognex 3100 1.41b disk
3 28-0115 PWR supply, Dropper type, 75mW
4 29-0259 Tropel 1X DUV Objective
5 38-0093 Matrox coaxial cable
6 39-0222 Driver motor Micro stepper
7 42-1337 Cathode Clamp
8 42-1338 Heat Sink
9 52-0243 XY Stage Motor
10 52-0272 Motor Assy, Z-stage
11 52-0282 Motor Assy, Color Filter Wheel
12 52-0284 Motor Assy, Turret
13 52-0288 ND Filter
14 52-0316 Aperature flipper
15 52-0330 Regulator Assy VAC
16 52-0397 XY Stage Motor
17 52-0453 Polarizer Assy
18 52-0455 Analyzer Assembly
19 52-0527 UV Cutoff Filter
20 52-0556 Turret Board
21 52-0620 Color filter wheel
22 52-0626 Reference Chip Assy
23 52-0744 Turret
24 52-0751 Apodizer
25 54-0216 F2 CPU
26 54-0258 PCA, Z- Limit Sensor
27 54-0261 PCA, Filter Wheel Interface
28 54-0264 PC Interface
29 54-0273 PCA, Operator Interface Board
30 54-0276 Door Interconnect Board
31 54-0277 PCA, Load Window Interface
32 54-0279 VTF Position Sensor
33 54-0282 PCA, Load windows switch
34 54-0286 Zero Order PDA detector
35 54-0287 Stage Driver, F2
36 54-0290 PCA, X-stage interface
37 54-0291 PCA, Z-stage Interface
38 54-0292 SBC Interconnect
39 54-0294 Turret Servo Driver
40 54-0302 Measurement control PCB
41 54-0317 Measurement control PCB
42 54-0346 Optics Interface board
43 54-0374 Measurement control PCB
44 54-0382 Focus Flipper and Driver
45 54-0393 SBC Interconnect
46 54-0396 Coarse Z- interface
47 54-0427 SBC interface
48 54-0448 User Interface PCA
49 54-0455 SBC interconnect
50 54-0462 SBC CPU
51 55-0258 ND Filter Wheel Sensor
52 55-1205 Digi 8 Adapter Cable
53 94-3008 Fan Kit, DC, UV 3inch
54 L2174-05 Xenon Lamp Long Life
55 Netgear ethernet card
56 Lamp housing assembly
57 Controller ESC-222B
58 Z-Stage Motor Assy
59 Field Uniformity Lens
60 PWM Servo Amplifier
61 THK Y Stage rail
62 Seagate ST32272W Hard Drive
63 XY Stage Encoder
64 Grating tool replacement cube
65 Platen
66 Cathode Clamp, STD
67 7mm Achromat lens, Edmund Optics

SFS 7×00
A B
1 Part Number Description
2 348260 7700 Transfer glass
3

AIT
A B C D
1 Part Number Description
2 0020885 AIT2 Analog Board
3 198773 24V PWR supply
4 285714 Data Process, S8000 tested
5 332216 AIT EMO switch
6 547247 UI Splitter, AIT 2
7 0017497 NewPort Stage
8 0032146-001 ASSY, pmt + PRE AMP PCB, AIT2
9 204718 Analog AIT1
10 2114B-30slt Power Supply
11 524638 AOD Driver ASSY-Used
12 AIT 1 Channel-Complete/New
13 AIT 1 Analog Board-New
14 AIT 1 Autofocus Assy-New
15 Microscope Illumination Fiber optic
16 AIT Autofocus unit-Used
17 200MM Chuck, tested, non contaminated-Used

FT and SM
A B C
1 Part Number Description
2 50-0112 Lamp Assembly
3 29-0021 Fiber Optics
4 50-0110 Lamp Assembly
5 53-0005 PCA, DATA TRANSLATION FT
6 54-0062 PCA Diagnostic , Spectra Map
7 54-0063 Lamp Interface Board
8 54-0076 S/M interface
9 54-0141 Motor Drive DC servo board
10 54-0252 Analog I/O
11 55-0254 System Interconnect/ RS232 Cable
12 96-0001 Vacuum Switch

Profiler
A B C D
1 Part Number Description
2 103306 Handler Finger Mount
3 112674 Track Ball
4 174203 Flat finder PCA assy, H2
5 217123 Microhead 1 Lamp Assembly
6 226017
7 230715 Head board, Electronic, ORCA Microhead I
8 231681 Universal PROF INTRFC (Internal ComputersP-20, P-2, AS 300)
9 231703 Scanner Box Interface
10 277096 Microhead II Head Board (not the tested part number)
11 422320 Tweezers, flat tip blunt nose
12 02-30066-0001 Handler Power Supply
13 050-452148-00 Lamp, halogen, 1/Volt w/o reflec
14 060852 RING, Retaining, Snapring, .375 Shaft
15 068357 Ask Reference
16 099660 H2 Back Plane
17 101885 Flat Finder
18 112992
19 134384 Shaft Encoder Buffer, HRP 240
20 156256 CXT100A CPU
21 172502 I/O Memory Universal Handler
22 172561 FF Controller, Handler
23 181137 Vacuum Driver / Sensor
24 184950 Buffer Board, Handler
25 26-0114 Video Card
26 54-0062 PCA Diagnostic, Spectromap
27 CT6000 Video Blaster/VGA Card/Cable (Original for DOS)
28 2um Stylus (green band)
29 Cardex SVGA Card
30 Sub Micron Stylus (Black Band)
31 Battery Pack 4.5 Volt
32 STB Systems Video Card-Used
33 6.3X Microscoop Objective, MELLES GRILT
34 DYNAPAR Track Ball
35 H2 Finger
36

FLEXUS
A B C
1 Part Number Description
2 Model CT200 Scale OHAUS
3 281107 Laser, 670nm
4 284645 Ring, Laser, 670 NM
5 403520 780 NM Laser
6 Data Translation PCB
7 MEI Board
8 750nm, Laser

Robotics
A B C D
1 Part Number Description
2 0000824-002 ASSY, FINGER, FORK, 200MM
3 0011325-000 finger, Fork, 300mm W/Pivot Pads
4 15-0025-01 V2.01Q Firmware
5 15-0108-01 V2.44c Firmware
6 51-0204 H2 Robot
7 52-0071 Flat Aligner
8 52-0334 Vacuum Valve
9 52-0337 Valve Assy, Frame Vacuum
10 52-0365 Brake Assy, Z Stage
11 53-0026 H2 CPU
12 54-0049 I/O PCB
13 54-0089 STD Bus Backplane
14 54-0095 Dual Stepper Driver
15 54-0101 Flat AlignerSensor
16 54-0112 Servo Motor Controller
17 54-0147 Aligner Sensor
18 54-0148 Flat Aligner Interface
19 54-0150 H2 Driver PCA
20 54-0215 H2 Interface Bd
21 54-0219 Main Intfc Board
22 54-0220 Theta Inteface, I/O H2
23 54-0221 Shuttle Intf Bd
24 54-0297 Servo Fuse Adapter
25 54-0412 Parallel I/O H2
26 96-0003 Regulator, Preset 50 PSI
27 96-0036 Reg, Vac, 30inch Hg.1/8npt
28 ZS91-0004 Pressure Switch
29 H2 Finger Ceremic
30 H2 Finger Metal
31 UV 1280 Finger
32 150MM Cassette base

OMD
A B C
1 Part Number Description
2 560-403143-00 Vacume filter SMC ZX1-F
3 710-404524-07 Calibration Target
4 710-450320-00 PID Controller
5 716-412248-00 Finger Shuttle Assembly
6 150MM Chuck, non reflective, STD
7 200MM Finger, STD
8 200MM, Finger, Smith
9 Finger, TFH
10 Z encoder
11 Chuck, 200MM STD
12 EMO Button
13 New Air Fittings
14 Fuji Film Data Cartridge DC6525
15 Verbatim data Cartridge 4MM-DL90M
16 Cassette Base

RS and VP
A B C D
1 Part Number Description
2 26-0057 Pneumatics interface
3 28-0005 Diagnostic Panel display
4 36-0024 Measurement card Jumper
5 36-0025 Measurement card Jumper
6 36-0029 Measurement card Jumper
7 36-0032 PCA, I/F, ART (54-0039)
8 36-0033 Theta Sensor ART (54-0108)
9 39-0002 RS 75 Stage Motor
10 39-0071 Coto Relay
11 42-1099 RS Pop Up Chuck
12 49-0004 Belt, Timing, 1/4W, .08 Pitch
13 49-0088 Belt
14 49-0226 Motor Belt
15 50-0002-01 Type A Probe head
16 50-0002-02 Type B Probe head
17 50-0002-10 Type F Probe head
18 51-0012 Theta Assy
19 51-0027 DC PWR Supply
20 52-0035-01 Theta Postion sensor
21 52-0035-02 Theta Postion sensor
22 52-0038 Probe Head cable assy
23 52-0240 Theta Motor
24 52-0287
25 52-0311 RS TC Platen
26 52-0616 Measurement electronics
27 53-0025 VP10-CPU
28 54-0005 Current Board
29 54-0006 Relay Board
30 54-0014 DVM
31 54-0024 sensor
32 54-0028 Probe arm sensor
33 54-0029 Door Sensor
34 54-0041 Theta Sensor ART
35 54-0046 Motor Driver PCB
36 54-0057 Power Supply Card
37 54-0097 Diagnostic driver board
38 54-0107 Probe up/down PCB
39 54-0108 Theta Sensor
40 54-0252 PCA, Analog I/O, Temp Compen
41 54-0338 Probe Head Interconnect RS75
42 54-0425 Lower Stage Interface with Interlock
43 54-0434-U SBC Board
44 55-0111 Interface cable
45 55-0803-01 Diag Panel, P1 Fiber cable
46 55-0803-04 Load Fiber cable
47 55-1120 Door interlock cable
48 58-0090 Theta rebuild Kit
49 58-0327 Kit, RS ESD Contact
50 96-0004 Soleniod
51 96-0015 Valve, 3-Way
52 RS Load door assy/ w motor
53 Digi 4 Card
54 M-Gage Thermal Printer Paper
55 Digi 4 Cable
56 Door Motor
57 CST 800 Track Ball
58 Compressed Air Filter
59 Scsi Adaptor Card
60 Air Filter
61 RS Chuck

SYSTEMS
A B
1 RS35C FULLY REFURBISHED
2 FLAT PANEL
3 STATRAX 6.3
4 1 PROBE (NEW)
5 120 DAY WARRANTY
6 PERFORMS FULLY TO OEM SPECIFICATIONS
7
8 RS55TC FULLY REFURBISHED
9 FLAT PANEL
10 STATRAX 6.5
11 1 PROBE (NEW)
12 120 DAY WARRANTY
13 PERFORMS FULLY TO OEM SPECIFICATIONS
14
15 VP10 FULLY REFURBISHED
16 1 PROBE (NEW)
17 120 DAY WARRANTY
18 PERFORMS FULLY TO OEM SPECIFICATIONS
19
20 UV1050 FULLY REFURBISHED
21 FLAT PANEL
22 NEW LAMP/PARABOLOID/SILICA
23 SKINS/COVERS REPAINTED
24 SUMMIT 2.62
25 GEM/SECS
26 PENTIUM COMPUTER
27 120 DAY WARRANTY
28 PERFORMS FULLY TO OEM SPECIFICATIONS
29
30 2132 All accessories and properly crated